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Scanning
Probe Microscope (AFM / STM / SNOM)
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Nano indentation System
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E-Beam, Lithography System
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Nano-imprint lithography System
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Lithography upgrades fore SEMs, Beam blankers, X-Y stages for
SEM
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Digital Holographic Microscope
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Thermal CVD, LPCVD and PECVD System for Nanotubes and Nanowires
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Non
contact optical profiler
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Atomic Layer Deposition System
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Nanpositioning and Nano measuring Machines